JPH0252182B2 - - Google Patents
Info
- Publication number
- JPH0252182B2 JPH0252182B2 JP61027965A JP2796586A JPH0252182B2 JP H0252182 B2 JPH0252182 B2 JP H0252182B2 JP 61027965 A JP61027965 A JP 61027965A JP 2796586 A JP2796586 A JP 2796586A JP H0252182 B2 JPH0252182 B2 JP H0252182B2
- Authority
- JP
- Japan
- Prior art keywords
- tunnel
- clean air
- clean
- service area
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007664 blowing Methods 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61027965A JPS62186149A (ja) | 1986-02-13 | 1986-02-13 | クリ−ンル−ムにおける空気清浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61027965A JPS62186149A (ja) | 1986-02-13 | 1986-02-13 | クリ−ンル−ムにおける空気清浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62186149A JPS62186149A (ja) | 1987-08-14 |
JPH0252182B2 true JPH0252182B2 (en]) | 1990-11-09 |
Family
ID=12235603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61027965A Granted JPS62186149A (ja) | 1986-02-13 | 1986-02-13 | クリ−ンル−ムにおける空気清浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62186149A (en]) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6430643A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Catalyst for purifying exhaust gas |
JPS6430642A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Catalyst for purifying exhaust gas |
JPH0714481B2 (ja) * | 1987-07-24 | 1995-02-22 | 松下電器産業株式会社 | 排ガス浄化用触媒 |
JPS6430644A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Nox decomposition catalyst |
JPS6430645A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Nox decomposition catalyst |
JPS6430647A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Catalyst for purifying exhaust gas |
JPS6430649A (en) * | 1987-07-24 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Nox decomposition catalyst |
US5487768A (en) * | 1994-01-31 | 1996-01-30 | Zytka; Donald J. | Minienvironment for material handling |
-
1986
- 1986-02-13 JP JP61027965A patent/JPS62186149A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62186149A (ja) | 1987-08-14 |
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